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No. 2 Special Project

No. 2 Special Project

Region: Hebei
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  • Main Sales Markets: North America, Central/South America, Western Europe, Eastern Europe, Australasia, Asia, Middle East, Africa
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 The No. 2 National S&T Major Special Project - “Research, Development and Industrialization of High-purity Electron Gas” jointly applied for by 5 collaborating institutions including the 718th research institute of CSIC (PERIC), Jiangsu Nata Opto-electronic Material etc. was approved by the government in 2013 and obtained national financial support. “No. 2 Special Project” of which the full name is “Manufacturing Equipment and Packed Technology of Super-large-scale Integrated Circuit” is organized by Special Project Implementation Administration office and is a key project of Ministry of Science and Technology. The purpose of this project is to develop crucial manufacturing equipment of integrated circuit, master advanced technology with independent intellectual property rights, break the current status of replying on imported high-end integrated circuit manufacturing equipment and technology, and drive technical promotion and structural adjustment of related industries. Within this project, PERIC undertakes the development and industrialization of 19 gases including NF3, WF6, SiF4, C2F6, C4F8, C3F8, HF, HCl, COF2 and electron gas mixture.
      PERIC's mature technology and production experience of NF3 and WF6 together with industrialization experience guaranteeto fully meet customers’ requirements.
      The development and trial production of COF2 have been completed with the purity reaching over 99%.
      Development of SiF4 and C2F6 has been nearly completed and is expected to be industrialized for production in 2015. Industrialization status of each product is shown in the below table.

Address: HandanHebeichina

City: Handan

Contact: Tong ying

TEL: -310-7182720

Fax: -310-7182798

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